Poly-SiGe for MEMS-above-CMOS Sensors

1. Introduction
Pilar González Ruiz, Kristin De Meyer, Ann Witvrouw

2. Poly-SiGe as Piezoresistive Material
Pilar González Ruiz, Kristin Meyer, Ann Witvrouw

3. Design of a Poly-SiGe Piezoresistive Pressure Sensor
Pilar González Ruiz, Kristin De Meyer, Ann Witvrouw

4. The Pressure Sensor Fabrication Process
Pilar González Ruiz, Kristin Meyer, Ann Witvrouw

5. Sealing of Surface Micromachined Poly-SiGe Cavities
Pilar González Ruiz, Kristin De Meyer, Ann Witvrouw

6. Characterization of Poly-SiGe Pressure Sensors
Pilar González Ruiz, Kristin De Meyer, Ann Witvrouw

7. CMOS Integrated Poly-SiGe Piezoresistive Pressure Sensor
Pilar González Ruiz, Kristin De Meyer, Ann Witvrouw

8. Conclusions and Future Work
Pilar González Ruiz, Kristin De Meyer, Ann Witvrouw

Nyckelord: Physics, Electronic Circuits and Devices, Circuits and Systems, Optical and Electronic Materials, Nanotechnology and Microengineering, Characterization and Evaluation of Materials