High Permittivity Gate Dielectric Materials

1. Introduction to High-k Gate Stacks
Samares Kar

2. MOSFET: Basics, Characteristics, and Characterization
Samares Kar

3. Hafnium-Based Gate Dielectric Materials
Akira Nishiyama

4. Hf-Based High-k Gate Dielectric Processing
Masaaki Niwa

5. Metal Gate Electrodes
Jamie K. Schaeffer

6.
V

FB
/V

TH
Anomaly in High-k Gate Stacks
Akira Toriumi, Toshihide Nabatame

7. Channel Mobility
Chadwin Young

8. Reliability Implications of Fast and Slow Degradation Processes in High-k Gate Stacks
Gennadi Bersuker

9. Lanthanide-Based High-k Gate Dielectric Materials
Daniel J. Lichtenwalner

10. Ternary HfO2 and La2O3 Based High-k Gate Dielectric Films for Advanced CMOS Applications
Akira Toriumi, Koji Kita

11. Crystalline Oxides on Silicon
H. Jörg Osten

12. High Mobility Channels
Michel Houssa, Peide Ye, Marc Heyns

Nyckelord: Engineering, Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Solid State Physics, Spectroscopy and Microscopy, Engineering, general