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Brand, Oliver

Resonant MEMS: Fundamentals, Implementation, and Application

Brand, Oliver - Resonant MEMS: Fundamentals, Implementation, and Application, e-bok

151,25€

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ISBN: 9783527676354
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Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Nyckelord: resonator piezoelectricity packaging stability biosensors fluid energy harvesting, resonator piezoelectricity packaging stability biosensors fluid energy harvesting, MEMS and Nanoelectronics

Utgivare
 
 
 
 
 
 
 
Utgivare
John Wiley and Sons, Inc.
Utgivningsår
2014
Språk
en
Utgåva
1
Serie
Advanced Micro and Nanosystems
Sidantal
450 sidor
Kategori
Teknologi, energi, trafik
Format
E-bok
eISBN (ePUB)
9783527676354
Tryckt ISBN
9783527335459

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