Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

1. Introduction
Seongbo Shim, Youngsoo Shin

Part I. Physical Design Optimizations

2. DSAL Manufacturability
Seongbo Shim, Youngsoo Shin

3. Placement Optimization for DSAL
Seongbo Shim, Youngsoo Shin

4. Post-Placement Optimization forMP-DSAL Compliant Layout
Seongbo Shim, Youngsoo Shin

5. Redundant Via Insertion for DSAL
Seongbo Shim, Youngsoo Shin

6. Redundant Via Insertion for MP-DSAL
Seongbo Shim, Youngsoo Shin

Part II. Mask Synthesis and Optimizations

7. DSAL Mask Synthesis
Seongbo Shim, Youngsoo Shin

8. Verification of Guide Patterns
Seongbo Shim, Youngsoo Shin

9. Cut Optimization
Seongbo Shim, Youngsoo Shin

10. Summary of The Book
Seongbo Shim, Youngsoo Shin

Nyckelord: Materials Science, Nanotechnology, Nanotechnology and Microengineering, Circuits and Systems, Optical and Electronic Materials, Nanoscale Science and Technology, Semiconductors