Helium Ion Microscopy

Part I. Fundamentals

1. The Helium Ion Microscope
John Notte, Jason Huang

2. Single Atom Gas Field Ion Sources for Scanning Ion Microscopy
Radovan Urban, Robert A. Wolkow, Jason L. Pitters

3. Structural Changes in 2D Materials Due to Scattering of Light Ions
Ossi Lehtinen, Jani Kotakoski

4. Monte Carlo Simulations of Focused Ion Beam Induced Processing
Rajendra Timilsina, Philip D. Rack

5. Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging
Yuri V. Petrov, Oleg F. Vyvenko

Part II. Microscopy

6. Introduction to Imaging Techniques in the HIM
Stuart A. Boden

7. HIM of Biological Samples
Armin Gölzhäuser, Gregor Hlawacek

8. HIM Applications in Combustion Science: Imaging of Catalyst Surfaces and Nascent Soot
Henning Vieker, André Beyer

9. Channeling and Backscatter Imaging
Gregor Hlawacek, Vasilisa Veligura, Raoul Gastel, Bene Poelsema

10. Helium Ion Microscopy of Carbon Nanomembranes
Armin Gölzhäuser

11. Helium Ion Microscopy for Two-Dimensional Materials
Yangbo Zhou, Daniel S. Fox, Hongzhou Zhang

Part III. Analysis

12. Backscattering Spectrometry in the Helium Ion Microscope: Imaging Elemental Compositions on the nm Scale
Rene Heller, Nico Klingner, Gregor Hlawacek

13. SIMS on the Helium Ion Microscope: A Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics
Tom Wirtz, David Dowsett, Patrick Philipp

14. Ionoluminescence
Vasilisa Veligura, Gregor Hlawacek

Part IV. Modification

15. Direct–Write Milling and Deposition with Noble Gases
Ivan Shorubalko, Lex Pillatsch, Ivo Utke

16. Resist Assisted Patterning
Nima Kalhor, Paul F. A. Alkemade

17. Focused Helium and Neon Ion Beam Modification of High-T
C Superconductors and Magnetic Materials
Shane A. Cybart, Rantej Bali, Gregor Hlawacek, Falk Röder, Jürgen Fassbender

18. Helium Ion Microscope Fabrication of Solid-State Nanopore Devices for Biomolecule Analysis
Osama K. Zahid, Adam R. Hall

19. Applications of GFIS in Semiconductors
Shida Tan, Rick Livengood

Nyckelord: Physics, Spectroscopy and Microscopy, Surfaces and Interfaces, Thin Films, Surface and Interface Science, Thin Films, Nanotechnology and Microengineering