Gao, Wei
Precision Nanometrology
1. Angle Sensor for Measurement of Surface Slope and Tilt Motion
2. Laser Autocollimator for Measurement of Multi-axis Tilt Motion
3. Surface Encoder for Measurement of In-plane Motion
4. Grating Encoder for Measurement of In-plane and Out-of-plane Motion
5. Scanning Multi-probe System for Measurement of Roundness
6. Scanning Error Separation System for Measurement of Straightness
7. Scanning Micro-stylus System for Measurement of Micro-aspherics
8. Large Area Scanning Probe Microscope for Micro-textured Surfaces
9. Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures
10. Scanning Image-sensor System for Measurement of Micro-dimensions
Nyckelord: Engineering, Manufacturing, Machines, Tools, Measurement Science and Instrumentation, Nanotechnology, Control, Robotics, Mechatronics
- Författare
- Gao, Wei
- Utgivare
- Springer
- Utgivningsår
- 2010
- Språk
- en
- Utgåva
- 1
- Serie
- Springer Series in Advanced Manufacturing
- Sidantal
- 367 sidor
- Kategori
- Teknologi, energi, trafik
- Format
- E-bok
- eISBN (PDF)
- 9781849962544