Baudrant, Annie
Silicon Technologies: Ion Implantation and Thermal Treatment
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
Nyckelord: jeanjacques; oxidation; techniques; overview; various; properties; physical; silica; atomic transport; equations; possible; mechanisms; place; transport; case; thermal; grove; theory, Electronic Materials, Electronic Materials, Electronic Materials, Electronic Materials
- Utgivare
- Baudrant, Annie
- Utgivare
- John Wiley and Sons, Inc.
- Utgivningsår
- 2011
- Språk
- en
- Utgåva
- 1
- Serie
- ISTE
- Sidantal
- 368 sidor
- Kategori
- Teknologi, energi, trafik
- Format
- E-bok
- eISBN (ePUB)
- 9781118601143
- Tryckt ISBN
- 9781848212312