Tuneable Film Bulk Acoustic Wave Resonators

1. Introduction
Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

2. Dielectric, Mechanical, and Electromechanical Properties of Ferroelectrics and Piezoelectrics
Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

3. Models of FBARs
Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

4. Making Non-tuneable Piezoelectric FBARs Tuneable
Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

5. FBARs Utilizing Induced Piezoelectric Effect
Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

6. Designs of Tuneable FBARs
Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

7. Fabrication Processes and Measurements
Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

8. Circuit Applications of Tuneable FBARs
Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

9. Conclusions and Challenges
Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

Nyckelord: Engineering, Circuits and Systems, Optical and Electronic Materials, Microwaves, RF and Optical Engineering