Measurement Technology for Micro-Nanometer Devices

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
• Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience

Nyckelord:

micro-nano device measuring technology, micro-nano devices online testing, dynamic testing, typical devices testing, Lab View soft, micro-vision system test software, automatic extraction of infrared light interference fringes, micro-nano structure three-dimensional morphology reconstruction algorithm software, computer precise synchronization control, image pre-processing, in-plane motion measurement and off-plane motion measurement software, test software, overall mechanical properties, characterizing MEMS/NEMS devices