Principles of Microelectromechanical Systems

This is the only book of its kind to focus on closed form solutions to micro-mechanical problems. This approach allows readers to easily understand the linear and nonlinear behavior of Micro Electro Mechanical Systems (MEMS) and their design applications. This approach will appeal especially to RF/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The book is also of interest to researchers in MEMS, graduate students in electrical and mechanical engineering, and specialists in electronics design and solid-state fabrication.