Setter, Nava
Electroceramic-Based MEMS
Part A.Applications and Devices
1. MEMS-Based Thin Film and Resonant Chemical Sensors
H. L. Tuller
2. Microactuators Based on Thin Films
R. Maeda, J.J. Tsaur, S.H. Lee, M. Ichiki
3. Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
P. Muralt
4. Thick-Film Piezoelectric and Magnetostrictive Devices
N.M. White, S.P. Beeby, N.J. Grabham
5. Micromachined Infrared Detectors Based on Pyroelectric Thin Films
P. Muralt
6. RF Bulk Acoustic Wave Resonators and Filters
H.P. Loebl, C. Metzmacher, R.F. Milsom, P. Lok, A. Tuinhout
7. High Frequency Tuneable Devices Based on Thin Ferroelectric Films
S. Gevorgian
8. MEMS for Optical Functionality
S.-G. Kim, G. Barbastathis, H. L. Tuller
Part B.Materials, Fabrication-Technology, and Functionality
9. Ceramic Thick Films for MEMS
R.A. Dorey, R.W. Whatmore
10. Thin Film Piezoelectrics for MEMS
S. Trolier-McKinstry, P. Muralt
11. Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices
O. Auciello, S. Saha, W. Fan, B. Kabius, S. K. Streiffer, D. Y. Kaufman, J. Im, P. Baumann
12. Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics
A.K. Tagantsev, V.O. Sherman, K.F. Astafiev, J. Venkatesh, N. Setter
13. Microfabrication of Piezoelectric MEMS
J. Baborowski
14. Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics
M. Alexe, C. Harnagea, D. Hesse
15. Low-Cost Patterning of Ceramic Thin Films
C. R. Martin, I. A. Aksay
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Nyckelord: SCIENCE / Chemistry / General SCI013000
- Författare
- Setter, Nava
- Utgivare
- Springer
- Utgivningsår
- 2005
- Språk
- en
- Utgåva
- 1
- Kategori
- Naturvetenskaper
- Format
- E-bok
- eISBN (PDF)
- 9780387233192