Introduction to Microsystem Design

1. Introduction
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2. Scaling Laws
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3. Elastic Deformations
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4. Thin Films
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5. Conductor Paths
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6. Membranes
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7. Strain Gauges on Membranes
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8. Beams
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9. Vibrations
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10. Capillaries
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11. Capacitive Forces
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12. Piezoelectric Effect
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13. Thermal Actuators
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14. Microoptics
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15. Diffusion
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16. Microvalves
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17. Micropumps
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18. Microdosing
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19. Analogies of Physical Domains
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20. Mechanical Devices for Electronics
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21. Pressure Sensors
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22. Flow Sensors
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23. Inertial Sensors
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