New Horizons of Applied Scanning Electron Microscopy

1. Introduction
Kenichi Shimizu, Tomoaki Mitani

2. Application Example 1: Lateral Resolution of in-Lens SE and High-Angle BSE Imaging at Low Accelerating Voltages, Below 2.0 kV
Kenichi Shimizu, Tomoaki Mitani

3. Application Example 2: Z-Contrast Sensitivity in Low-Voltage, High-Angle BSE Imaging
Kenichi Shimizu, Tomoaki Mitani

4. Application Example 3: Information Depth in Low-Voltage, High-Angle BSE Imaging
Kenichi Shimizu, Tomoaki Mitani

5. Application Example 4: Nano Inclusions in Co-Hardened Gold Plating for Electronic Applications – Further Evidence for High Lateral Resolution in Low-Voltage, High-Angle BSE Imaging
Kenichi Shimizu, Tomoaki Mitani

6. Application Example 5: A Thin Layer of Organic Contaminant on the Surface of Mirror-Polished Al-Based Hard Disks
Kenichi Shimizu, Tomoaki Mitani

7. Application Example 6: A Further Potential of Ultralow-Voltage In-lens SE Imaging
Kenichi Shimizu, Tomoaki Mitani

8. Application Example 7: Sample Surface Preparation by Ultramicrotomy Using a Diamond Knife for Cross-Sectional Examination of Various Coatings on Metals
Kenichi Shimizu, Tomoaki Mitani

9. Application Example 8: Cross-Sectional Examination of a Galvanized Steel
Kenichi Shimizu, Tomoaki Mitani

10. Application Example 9: Cross-Sectional Examination of a Painted Steel
Kenichi Shimizu, Tomoaki Mitani

11. Application Example 10: Cross-Sectional Examination of Solder Joint of the Printed Circuit Board
Kenichi Shimizu, Tomoaki Mitani

12. Application Example 11: Cross-Sectional Examination of a Tin-Plated Copper Sheet for Electronic Application
Kenichi Shimizu, Tomoaki Mitani

13. Application Example 12: Cross-Sectional Examination of an Anodized Aluminum Alloy for Aerospace Application
Kenichi Shimizu, Tomoaki Mitani

14. Application Example 13: Cross-Sectional Examination of a Porous Anodic Oxide Film Grown on a Heterogeneous Al-Fe Alloy
Kenichi Shimizu, Tomoaki Mitani

15. Application Example 14: Corrosion of an Al 2024-T3 Alloy for Aerospace Application
Kenichi Shimizu, Tomoaki Mitani

16. Application Example 15: Cross-Sectional Examination of an Etched Al Foil for Capacitor Application
Kenichi Shimizu, Tomoaki Mitani

17. Application Example 16: On the Nature of rf-GD Sputtering
Kenichi Shimizu, Tomoaki Mitani

18. Application Example 17: On the Surface Damages Associated with rf-GD Sputtering
Kenichi Shimizu, Tomoaki Mitani

19. Application Example 18: Precipitates in a Stainless Steel
Kenichi Shimizu, Tomoaki Mitani

20. Application Example 19: Ferrite Precipitates in a Low-Carbon Stainless Steel
Kenichi Shimizu, Tomoaki Mitani

21. Application Example 20: A Novel Use of rf-GD Sputtered Surfaces for Oxidation Study of Iron, Nickel, and Copper
Kenichi Shimizu, Tomoaki Mitani

22. Application Example 21: Preparation of “Highly Flat and Damage-Free” Surfaces for High-Resolution Channeling BSE Imaging
Kenichi Shimizu, Tomoaki Mitani

23. Application Example 22: Oxidation of Sputtered Metal Surface in Air – The Main Cause of Surface Alternation
Kenichi Shimizu, Tomoaki Mitani

24. Application Example 23: Microstructure of a Ti Alloy
Kenichi Shimizu, Tomoaki Mitani

25. Application Example 24: Microstructure of a Ni-Based Super Alloy for Aerospace Applications
Kenichi Shimizu, Tomoaki Mitani

26. Application Example 25: Cracks in a Nitrogen-Doped Stainless Steel
Kenichi Shimizu, Tomoaki Mitani

27. Application Example 26: Sample Surface Preparation Using rf-GD Sputtering for Cross-Sectional Examination
Kenichi Shimizu, Tomoaki Mitani

28. Application Example 27: Cross-Sectional Examination of a Galvanized Steel for Car Bodies
Kenichi Shimizu, Tomoaki Mitani

29. Application Example 28: Cross-Sectional Examination of a Flash Memory Device
Kenichi Shimizu, Tomoaki Mitani

30. Application Example 29: Cross-Sectional Examination of a Multilayered Glass
Kenichi Shimizu, Tomoaki Mitani

31. Application Example 30: Cross-Sectional Examination of a Copper Sheet for Electronic Application
Kenichi Shimizu, Tomoaki Mitani

32. Application Example 31: Cross-Sectional Examination of a Nitrided Carbon Steel
Kenichi Shimizu, Tomoaki Mitani

33. Application Example 32: Cross-Sectional Examination of Deformed Surface Regions of Carbon Steel after Shot Peening
Kenichi Shimizu, Tomoaki Mitani

34. Application Example 33: Cross-Sectional Examination of a Thermal-Sprayed WC-18% Co Coating on a Titanium Alloy
Kenichi Shimizu, Tomoaki Mitani

35. Application Example 34: Cross-Sectional Examination of a Thermal Barrier Coating on the Ni-based Super Alloy for Aerospace Applications
Kenichi Shimizu, Tomoaki Mitani

36. Application Example 35: Is EDX Elemental Mapping Really Necessary?
Kenichi Shimizu, Tomoaki Mitani

37. Application Example 36: Titanium Carbide Precipitates in a Duplex Stainless Steel
Kenichi Shimizu, Tomoaki Mitani

38. Application Example 37: Adhesion Between the Hard Chromium Coating and Copper Substrate
Kenichi Shimizu, Tomoaki Mitani

39. Application Example 38: On the Possibility of the Use of rf-GD Sputtering for Follow-Up Treatment of Thin Slices for TEM Examination
Kenichi Shimizu, Tomoaki Mitani

40. Application Example 39: On 3D Imaging of Semiconductor Devices by FE-SEM
Kenichi Shimizu, Tomoaki Mitani

41. Concluding Remarks
Kenichi Shimizu, Tomoaki Mitani

Avainsanat: Material Science, Surfaces and Interfaces, Thin Films, Measurement Science and Instrumentation, Solid State Physics, Spectroscopy and Microscopy, Nanotechnology, Nanotechnology and Microengineering