System-level Modeling of MEMS

Filling a gap in the literature, this is the first handbook to simultaneously address the three most important approaches of system-level modeling: physical modeling with lumped elements and Kirchhoffian networks, modal modeling to accurately describe the mechanical domain, and mathematical modeling employing, for example, model order reduction methods.
By adopting this approach, the top editors and authors from industry and research have created a book that will set the standard for years to come. Writing on a clearly understandable and sufficiently detailed level, they familiarize readers with the physical and mathematical underpinnings of MEMS modeling, thus enabling users to choose the most suitable method for their particular application needs.
Perfectly tailored to practitioners and engineers, this reference presents the advantages and pitfalls of each method -- and how to avoid the latter.

Avainsanat: MEMS and Nanoelectronics