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Brand, Oliver

Resonant MEMS: Fundamentals, Implementation, and Application

Brand, Oliver - Resonant MEMS: Fundamentals, Implementation, and Application, e-kirja

151,25€

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ISBN: 9783527676354
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Tulostus135 sivua ja lisä sivu kertyy joka 6. tunti, ylärajana 135 sivua
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Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Avainsanat: resonator piezoelectricity packaging stability biosensors fluid energy harvesting, resonator piezoelectricity packaging stability biosensors fluid energy harvesting, MEMS and Nanoelectronics

Toimittaja
 
 
 
 
 
 
 
Julkaisija
John Wiley and Sons, Inc.
Julkaisuvuosi
2014
Kieli
en
Painos
1
Sarja
Advanced Micro and Nanosystems
Sivumäärä
450 sivua
Kategoria
Tekniikka, energia, liikenne
Tiedostomuoto
E-kirja
eISBN (ePUB)
9783527676354
Painetun ISBN
9783527335459

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