Dielectric Breakdown in Gigascale Electronics

1. Introduction
Juan Pablo Borja, Toh-Ming Lu, Joel Plawsky

2. General Theories
Juan Pablo Borja, Toh-Ming Lu, Joel Plawsky

3. Measurement Tools and Test Structures
Juan Pablo Borja, Toh-Ming Lu, Joel Plawsky

4. Experimental Techniques
Juan Pablo Borja, Toh-Ming Lu, Joel Plawsky

5. Breakdown Experiments
Juan Pablo Borja, Toh-Ming Lu, Joel Plawsky

6. Kinetics of Charge Carrier Confinement in Thin Dielectrics
Juan Pablo Borja, Toh-Ming Lu, Joel Plawsky

7. Theory of Dielectric Breakdown in Nano-Porous Thin Films
Juan Pablo Borja, Toh-Ming Lu, Joel Plawsky

8. Dielectric Breakdown in Copper Interconnects
Juan Pablo Borja, Toh-Ming Lu, Joel Plawsky

9. Reconsidering Conventional Field Acceleration Models
Juan Pablo Borja, Toh-Ming Lu, Joel Plawsky

Avainsanat: Materials Science, Optical and Electronic Materials, Nanotechnology and Microengineering, Electronic Circuits and Devices, Nanotechnology