Silicon Technologies: Ion Implantation and Thermal Treatment

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

Avainsanat: jeanjacques; oxidation; techniques; overview; various; properties; physical; silica; atomic transport; equations; possible; mechanisms; place; transport; case; thermal; grove; theory, Electronic Materials, Electronic Materials, Electronic Materials, Electronic Materials