Metal-Dielectric Interfaces in Gigascale Electronics

1. Introduction
Ming He, Toh-Ming Lu

2. Metal–Dielectric Diffusion Processes: Fundamentals
Ming He, Toh-Ming Lu

3. Experimental Techniques
Ming He, Toh-Ming Lu

4. Al-Dielectric Interfaces
Ming He, Toh-Ming Lu

5. Cu-Dielectric Interfaces
Ming He, Toh-Ming Lu

6. Barrier Metal–Dielectric Interfaces
Ming He, Toh-Ming Lu

7. Self-Forming Barriers
Ming He, Toh-Ming Lu

8. Kinetics of Ion Drift
Ming He, Toh-Ming Lu

9. Time-Dependent Dielectric Breakdown (TDDB) and Future Directions
Ming He, Toh-Ming Lu

Avainsanat: Engineering, Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Surface and Interface Science, Thin Films, Nanotechnology and Microengineering, Electrochemistry, Engineering Thermodynamics, Heat and Mass Transfer