Feedback Control of MEMS to Atoms

1. Introduction
Jason J. Gorman, Benjamin Shapiro

2. Feedback Control of Particle Size Distribution in Nanoparticle Synthesis and
Processing
Mingheng Li, Panagiotis D. Christofides

3. In Situ Optical Sensing and State Estimation for Control of Surface Processing
Rentian Xiong, Martha A. Grover

4. Automated Tip-Based 2-D Mechanical Assembly of Micro/Nanoparticles
Cagdas D. Onal, Onur Ozcan, Metin Sitti

5. Atomic Force Microscopy: Principles and Systems Viewpoint Enabled Methods
Srinivasa Salapaka, Murti Salapaka

6. Feedback Control of Optically Trapped Particles
Jason J. Gorman, Arvind Balijepalli, Thomas W. LeBrun

7. Position Control of MEMS
Michael S.-C. Lu

8. Dissecting Tuned MEMS Vibratory Gyros
Dennis Kim, Robert T. M’Closkey

9. Feedback Control of Microflows
Mike Armani, Zach Cummins, Jian Gong, Pramod Mathai, Roland Probst, Chad Ropp, Edo Waks, Shawn Walker, Benjamin Shapiro

10. Problems in Control of Quantum Systems
Navin Khaneja

11. Common Threads and Technical Challenges in Controlling Micro- and Nanoscale Systems
Benjamin Shapiro, Jason J. Gorman

Avainsanat: Engineering, Control, Robotics, Mechatronics, Electronics and Microelectronics, Instrumentation, Vibration, Dynamical Systems, Control, Nanotechnology