Chiang, Charles C.
Design for Manufacturability and Yield for Nano-Scale CMOS
Table of contents
1. Introduction
Charles C. Chiang, Jamil Kawa
2. Random Defects
Charles C. Chiang, Jamil Kawa
3. Systematic Yield - Lithography
Charles C. Chiang, Jamil Kawa
4. Systematic Yield - Chemical Mechanical Polishing (CMP)
Charles C. Chiang, Jamil Kawa
5. Variability & Parametric Yield
Charles C. Chiang, Jamil Kawa
6. Design for Yield
Charles C. Chiang, Jamil Kawa
7. Yield Prediction
Charles C. Chiang, Jamil Kawa
8. Conclusions
Charles C. Chiang, Jamil Kawa
Avainsanat: Engineering, Circuits and Systems, Electronics and Microelectronics, Instrumentation, Computer-Aided Engineering (CAD, CAE) and Design, Processor Architectures, Software Engineering/Programming and Operating Systems, Nanotechnology
- Tekijä(t)
- Chiang, Charles C.
- Kawa, Jamil
- Julkaisija
- Springer
- Julkaisuvuosi
- 2007
- Kieli
- en
- Painos
- 1
- Sarja
- Series on Integrated Circuits and Systems
- Sivumäärä
- 281 sivua
- Kategoria
- Tekniikka, energia, liikenne
- Tiedostomuoto
- E-kirja
- eISBN (PDF)
- 9781402051883
