Design for Manufacturability and Statistical Design

Part I.Sources of Variability

1. Introduction
2. Front End Variability
3. Back End Variability
4. Environmental Variability
Part II.Variability Characterization and Analysis

5. Test Structures For Variability
6. Statistical Foundations Of Data Analysis And Modeling
Part III.Design Techniques for Systematic Manufacturability Problems

7. Lithography Enhancement Techniques
8. Ensuring Interconnect Planarity
Part IV.Statistical Circuit Design

9. Statistical Circuit Analysis
10. Statistical Static Timing Analysis
11. Leakage Variability And Joint Parametric Yield
12. Parametric Yield Optimization
13. Conclusions

DRM-restrictions

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Avainsanat: TECHNOLOGY & ENGINEERING / General TEC000000