MEMS Materials and Processes Handbook

1. The MEMS Design Process
Tina L. Lamers, Beth L. Pruitt

2. Additive Processes for Semiconductors and Dielectric Materials
Christian A. Zorman, Robert C. Roberts, Li Chen

3. Additive Processes for Metals
David P. Arnold, Monika Saumer, Yong-Kyu Yoon

4. Additive Processes for Polymeric Materials
Ellis Meng, Xin Zhang, William Benard

5. Additive Processes for Piezoelectric Materials: Piezoelectric MEMS
Ronald G. Polcawich, Jeffrey S. Pulskamp

6. Materials and Processes in Shape Memory Alloy
Takashi Mineta, Yoichi Haga

7. Dry Etching for Micromachining Applications
Srinivas Tadigadapa, Franz Lärmer

8. MEMS Wet-Etch Processes and Procedures
David W. Burns

9. MEMS Lithography and Micromachining Techniques
Daniel R. Hines, Nathan P. Siwak, Lance A. Mosher, Reza Ghodssi

10. Doping Processes for MEMS
Alan D. Raisanen

11. Wafer Bonding
Shawn J. Cunningham, Mario Kupnik

12. MEMS Packaging Materials
Ann Garrison Darrin, Robert Osiander

13. Surface Treatment and Planarization
Pinyen Lin, Roya Maboudian, Carlo Carraro, Fan-Gang Tseng, Pen-Cheng Wang, Yongqing Lan

14. MEMS Process Integration
Michael A. Huff, Stephen F. Bart, Pinyen Lin

Avainsanat: Engineering, Electronics and Microelectronics, Instrumentation, Materials Science, general, Circuits and Systems, Surfaces and Interfaces, Thin Films