Sisäänkirjautuminen

Setter, Nava

Electroceramic-Based MEMS

Setter, Nava - Electroceramic-Based MEMS, e-kirja

137,45€

E-kirja, PDF, Adobe DRM-suojattu
ISBN: 9780387233192
DRM-rajoitukset

TulostusEi sallittu
Kopioi leikepöydälleEi sallittu

Table of contents

Part A.Applications and Devices

1. MEMS-Based Thin Film and Resonant Chemical Sensors
H. L. Tuller

2. Microactuators Based on Thin Films
R. Maeda, J.J. Tsaur, S.H. Lee, M. Ichiki

3. Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
P. Muralt

4. Thick-Film Piezoelectric and Magnetostrictive Devices
N.M. White, S.P. Beeby, N.J. Grabham

5. Micromachined Infrared Detectors Based on Pyroelectric Thin Films
P. Muralt

6. RF Bulk Acoustic Wave Resonators and Filters
H.P. Loebl, C. Metzmacher, R.F. Milsom, P. Lok, A. Tuinhout

7. High Frequency Tuneable Devices Based on Thin Ferroelectric Films
S. Gevorgian

8. MEMS for Optical Functionality
S.-G. Kim, G. Barbastathis, H. L. Tuller

Part B.Materials, Fabrication-Technology, and Functionality

9. Ceramic Thick Films for MEMS
R.A. Dorey, R.W. Whatmore

10. Thin Film Piezoelectrics for MEMS
S. Trolier-McKinstry, P. Muralt

11. Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices
O. Auciello, S. Saha, W. Fan, B. Kabius, S. K. Streiffer, D. Y. Kaufman, J. Im, P. Baumann

12. Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics
A.K. Tagantsev, V.O. Sherman, K.F. Astafiev, J. Venkatesh, N. Setter

13. Microfabrication of Piezoelectric MEMS
J. Baborowski

14. Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics
M. Alexe, C. Harnagea, D. Hesse

15. Low-Cost Patterning of Ceramic Thin Films
C. R. Martin, I. A. Aksay

DRM-restrictions

Printing: not available
Clipboard copying: not available

Avainsanat: SCIENCE / Chemistry / General SCI013000

Tekijä(t)
Julkaisija
Springer
Julkaisuvuosi
2005
Kieli
en
Painos
1
Kategoria
Eksaktit luonnontieteet
Tiedostomuoto
E-kirja
eISBN (PDF)
9780387233192

Samankaltaisia e-kirjoja