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Deulin, E. A.

Mechanics and Physics of Precise Vacuum Mechanisms

Deulin, E. A. - Mechanics and Physics of Precise Vacuum Mechanisms, ebook

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ISBN: 9789048125203
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Table of contents

1. Using Precise Mechanisms in Modern Vacuum Technological Equipment
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

2. Typical Vacuum Mechanisms
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

3. Friction in Vacuum
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

4. Matrix Method of the Design of New Mechanisms Structure
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

5. Precision of Vacuum Mechanisms
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

6. Vacuum Mechanisms of Nanoscale Precision
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

7. Ultrahigh Vacuum Rotary-Motion Feedthroughs
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

8. Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

9. Vacuum Frictionless Mechanisms Based on the Principle of Controlled Elastic Deformation
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

10. Flow of Microparticles Originating from Mechanisms in Vacuum
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa

Keywords: Engineering, Engineering Design, Engineering, general, Tribology, Corrosion and Coatings, Surfaces and Interfaces, Thin Films, Vibration, Dynamical Systems, Control

Author(s)
 
 
 
Publisher
Springer
Publication year
2010
Language
en
Edition
1
Series
Fluid Mechanics and Its Applications
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9789048125203

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