Deulin, E. A.
Mechanics and Physics of Precise Vacuum Mechanisms
1. Using Precise Mechanisms in Modern Vacuum Technological Equipment
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
2. Typical Vacuum Mechanisms
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
3. Friction in Vacuum
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
4. Matrix Method of the Design of New Mechanisms Structure
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
5. Precision of Vacuum Mechanisms
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
6. Vacuum Mechanisms of Nanoscale Precision
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
7. Ultrahigh Vacuum Rotary-Motion Feedthroughs
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
8. Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
9. Vacuum Frictionless Mechanisms Based on the Principle of Controlled Elastic Deformation
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
10. Flow of Microparticles Originating from Mechanisms in Vacuum
E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
Keywords: Engineering, Engineering Design, Engineering, general, Tribology, Corrosion and Coatings, Surfaces and Interfaces, Thin Films, Vibration, Dynamical Systems, Control
- Author(s)
- Deulin, E. A.
- Mikhailov, V. P.
- Panfilov, Yu V.
- Nevshupa, R. A.
- Publisher
- Springer
- Publication year
- 2010
- Language
- en
- Edition
- 1
- Series
- Fluid Mechanics and Its Applications
- Page amount
- 14 pages
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (PDF)
- 9789048125203
