MEMS Product Engineering

Part I. General Introductions

1. Introduction
Dirk Ortloff, Thilo Schmidt, Kai Hahn, Tomasz Bieniek, Grzegorz Janczyk, Rainer Brück

2. Introduction to Product Engineering
Dirk Ortloff, Thilo Schmidt, Kai Hahn, Tomasz Bieniek, Grzegorz Janczyk, Rainer Brück

3. Micro- and Nano Systems: A World of Its Own
Dirk Ortloff, Thilo Schmidt, Kai Hahn, Tomasz Bieniek, Grzegorz Janczyk, Rainer Brück

Part II. MEMS Product Engineering Aspects and Methods

4. MEMS Product Engineering
Dirk Ortloff, Thilo Schmidt, Kai Hahn, Tomasz Bieniek, Grzegorz Janczyk, Rainer Brück

5. Methodology
Dirk Ortloff, Thilo Schmidt, Kai Hahn, Tomasz Bieniek, Grzegorz Janczyk, Rainer Brück

6. MEMS PE Infrastructure Components
Dirk Ortloff, Thilo Schmidt, Kai Hahn, Tomasz Bieniek, Grzegorz Janczyk, Rainer Brück

Part III. Practical Method Application

7. Application of the Methodology: A Sample Scenario
Dirk Ortloff, Thilo Schmidt, Kai Hahn, Tomasz Bieniek, Grzegorz Janczyk, Rainer Brück

8. Details for Managing a Project
Dirk Ortloff, Thilo Schmidt, Kai Hahn, Tomasz Bieniek, Grzegorz Janczyk, Rainer Brück

Keywords: Engineering, Nanotechnology and Microengineering, Engineering Design, Computer-Aided Engineering (CAD, CAE) and Design, Innovation/Technology Management