Nanofabrication

1. Directions in Nanofabrication
Steven K. Dew, Maria Stepanova

2. Fundamentals of Electron Beam Exposure and Development
Mohammad Ali Mohammad, Mustafa Muhammad, Steven K. Dew, Maria Stepanova

3. Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning
Ioannis Raptis, George P. Patsis

4. Helium Ion Lithography
Emile Drift, Diederik J. Maas

5. Nanoimprint Technologies
Christophe Peroz, Vincent Reboud, Clivia M. Sotomayor Torres

6. Atomic Layer Deposition for Nanotechnology
A. Foroughi-Abari, K. Cadien

7. Surface Functionalization in the Nanoscale Domain
Richard L. McCreery, Adam Johan Bergren

8. Nanostructures Based on Self-Assembly of Block Copolymers
E. Bhoje Gowd, Mallikarjuna Shroff Rama, Manfred Stamm

9. Epitaxial Growth of Metals on Semiconductors Via Electrodeposition
Karen L. Kavanagh

10. Chemical Mechanical Polish for Nanotechnology
L. Nolan, K. Cadien

11. Deposition, Milling, and Etching with a Focused Helium Ion Beam
P. F. A. Alkemade, E. Veldhoven

12. Laser Nanopatterning
Robert Fedosejevs, Ying Tsui, Zhijiang Chen, Shyama Banerjee

13. Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania
Karthik Shankar

Keywords: Materials Science, Nanotechnology, Nanochemistry, Nanotechnology and Microengineering, Laser Technology, Photonics