Tetrahedrally Bonded Amorphous Carbon Films I

Part I. Carbon Materials and Coatings

1. Carbon
Bernd Schultrich

2. Diamond Films
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3. Nanodiamond Films
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4. Amorphous Carbon Films
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5. Hydrogenated Amorphous Carbon Films (a-C:H)
Bernd Schultrich

Part II. Structural Development of ta-C Films

6. Structure of Amorphous Carbon
Bernd Schultrich

7. Influence of Deposition Conditions
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8. Growth of ta-C Films
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Part III. Vacuum Arc Deposition of Carbon Films

9. Vacuum Arc Discharges with Carbon Cathodes
Bernd Schultrich

10. Methods of Vacuum Arc Deposition of ta-C Films
Bernd Schultrich

11. Vacuum Arc with Particle Filtering
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12. Special Arc Modes with Reduced Macroparticle Emission
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13. Vacuum Arc Equipment for Mass Production of ta-C Coatings
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Part IV. Deposition of ta-C Films by Pulsed Laser and by Sputtering

14. Carbon Ablation with ns Lasers
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15. Carbon Film Deposition with ns Lasers
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16. Related Deposition Methods
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17. Activated Sputter Deposition of ta-C Films
Bernd Schultrich

Keywords: Materials Science, Structural Materials, Characterization and Evaluation of Materials, Surfaces and Interfaces, Thin Films