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Schultrich, Bernd

Tetrahedrally Bonded Amorphous Carbon Films I

Schultrich, Bernd - Tetrahedrally Bonded Amorphous Carbon Films I, ebook

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ISBN: 9783662559277
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Table of contents

Part I. Carbon Materials and Coatings

1. Carbon
Bernd Schultrich

2. Diamond Films
Bernd Schultrich

3. Nanodiamond Films
Bernd Schultrich

4. Amorphous Carbon Films
Bernd Schultrich

5. Hydrogenated Amorphous Carbon Films (a-C:H)
Bernd Schultrich

Part II. Structural Development of ta-C Films

6. Structure of Amorphous Carbon
Bernd Schultrich

7. Influence of Deposition Conditions
Bernd Schultrich

8. Growth of ta-C Films
Bernd Schultrich

Part III. Vacuum Arc Deposition of Carbon Films

9. Vacuum Arc Discharges with Carbon Cathodes
Bernd Schultrich

10. Methods of Vacuum Arc Deposition of ta-C Films
Bernd Schultrich

11. Vacuum Arc with Particle Filtering
Bernd Schultrich

12. Special Arc Modes with Reduced Macroparticle Emission
Bernd Schultrich

13. Vacuum Arc Equipment for Mass Production of ta-C Coatings
Bernd Schultrich

Part IV. Deposition of ta-C Films by Pulsed Laser and by Sputtering

14. Carbon Ablation with ns Lasers
Bernd Schultrich

15. Carbon Film Deposition with ns Lasers
Bernd Schultrich

16. Related Deposition Methods
Bernd Schultrich

17. Activated Sputter Deposition of ta-C Films
Bernd Schultrich

Keywords: Materials Science, Structural Materials, Characterization and Evaluation of Materials, Surfaces and Interfaces, Thin Films

Author(s)
Publisher
Springer
Publication year
2018
Language
en
Edition
1
Series
Springer Series in Materials Science
Page amount
32 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9783662559277
Printed ISBN
978-3-662-55925-3

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