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Schomburg, Werner Karl

Introduction to Microsystem Design

Schomburg, Werner Karl - Introduction to Microsystem Design, ebook

152,50€

Ebook, PDF with Adobe DRM
ISBN: 9783642194894
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Table of contents

1. Introduction
Werner Karl Schomburg

2. Scaling Laws
Werner Karl Schomburg

3. Elastic Deformations
Werner Karl Schomburg

4. Thin Films
Werner Karl Schomburg

5. Conductor Paths
Werner Karl Schomburg

6. Membranes
Werner Karl Schomburg

7. Strain Gauges on Membranes
Werner Karl Schomburg

8. Beams
Werner Karl Schomburg

9. Vibrations
Werner Karl Schomburg

10. Capillaries
Werner Karl Schomburg

11. Capacitive Forces
Werner Karl Schomburg

12. Piezoelectric Effect
Werner Karl Schomburg

13. Thermal Actuators
Werner Karl Schomburg

14. Microoptics
Werner Karl Schomburg

15. Diffusion
Werner Karl Schomburg

16. Microvalves
Werner Karl Schomburg

17. Micropumps
Werner Karl Schomburg

18. Microdosing
Werner Karl Schomburg

19. Analogies of Physical Domains
Werner Karl Schomburg

20. Mechanical Devices for Electronics
Werner Karl Schomburg

21. Pressure Sensors
Werner Karl Schomburg

22. Flow Sensors
Werner Karl Schomburg

23. Inertial Sensors
Werner Karl Schomburg

Keywords: Engineering, Nanotechnology and Microengineering, Optical and Electronic Materials, Applied and Technical Physics, Circuits and Systems

Author(s)
Publisher
Springer
Publication year
2011
Language
en
Edition
1
Series
RWTHedition
Page amount
21 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9783642194894

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