Design and Manufacturing of Active Microsystems

1. Introduction
S. Büttgenbach, A. Burisch

2. Electromagnetic Design of Microactuators
G. Janssen, R. Gehrking, J. Edler, B. Ponick, H.-D. Stölting

3. Drive Systems Based on Electromagnetic Microactuators
V. Ganesan, K. Wiedmann, A. Beradinelli, S. Demmig, H.-D. Stölting, A. Mertens

4. Modular Computer Aided Design Environment for Active Microsystems
U. Triltsch, U. Hansen, C. Boese, J. R. Ziebart, H.-J. Franke, T. Vietor, S. Büttgenbach

5. Wear Behavior in Microactuator Interfaces
R. Bandorf, F. Pape, H. H. Gatzen, G. Bräuer

6. Friction Behavior in Microsystems
A. Phataralaoha, R. Bandorf, G. Bräuer, S. Büttgenbach

7. Active Linear Guiding Concepts for Microsystems
H. Kayapinar, H.-C. Möhring, B. Denkena

8. Design of Sensors for Position Control of Microactuators
A. Kornfeld, C. Kolleck, A. Ostendorf

9. Tactile Dimensional Micrometrology
S. Bütefisch, U. Brand, L. Doering, G. Dai, L. Koenders, G. Wilkening

10. Fabrication of Magnetic Layers for Electromagnetic Microactuators
J. Chen, C. Ruffert, H. H. Gatzen, R. Bandorf, G. Bräuer

11. Fabrication of Excitation Coils for Electromagnetic Microactuators
F. Pape, A. Waldschik, C. Ruffert, O. Traisigkhachol, M. Feldmann, T. Kohlmeier, V. Seidemann, S. Büttgenbach, H. H. Gatzen

12. Development and Fabrication of Electromagnetic Microactuators
A. Waldschik, M. Feldmann, V. Seidemann, S. Büttgenbach

13. Development and Fabrication of Linear and Multi-Axis Microactuators
S. Hansen, H. H. Gatzen

14. Micromachining of Parts for Microsystems
D. Hahmann, M. Rüggeberg, R. Wittmer, M. Reichstein, M. Hlavac, B. Denkena, H.-W. Hoffmeister

15. Size-Adapted Manipulation Robots for Microassembly
J. Ellwood, A. Burisch, K. Schöttler, G. Pokar, A. Raatz, J. Hesselbach

16. Tools for Handling and Assembling of Microparts
B. Hoxhold, J. Wrege, S. Bütefisch, A. Burisch, A. Raatz, J. Hesselbach, S. Büttgenbach

17. Stereophotogrammetry in Microassembly
C. Keck, M. Berndt, R. Tutsch

18. Use of Hot Melt Adhesives for the Assembly of Microsystems
G. Hemken, S. Böhm, K. Dilger

19. Design of a Microassembly Process Based on Hot Melt Adhesives
S. Rathmann, J. Ellwood, A. Raatz, J. Hesselbach

20. Design of an Automated Assembly for Micro and Nano Actuators
S. Rathmann, S. Hansen, A. Raatz, H. H. Gatzen

21. Bistable Microvalve for Biomedical Usage
A. Balck, C. Kirsch, U. Schmid, H. Seidel, M. Leester-Schädel, S. Büttgenbach

22. Microassembly Following the Desktop Factory Concept
A. Burisch, S. Deumlich, R. Degen, A. Raatz, J. Hesselbach

23. Automated Optical BGA-Inspection – AUTOBIN
D. Gnieser, R. Tutsch

24. Slider with Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disk Drives
C. Ruffert, H. Saalfeld, H. H. Gatzen

Keywords: Engineering, Nanotechnology and Microengineering, Mechatronics, Operating Procedures, Materials Treatment, Nanotechnology