Optical Measurement of Surface Topography

1. Introduction to Surface Texture Measurement
Richard Leach

2. Some Common Terms and Definitions
Richard Leach

3. Limitations of Optical 3D Sensors
Gerd Häusler, Svenja Ettl

4. Calibration of Optical Surface Topography Measuring Instruments
Richard Leach, Claudiu Giusca

5. Chromatic Confocal Microscopy
François Blateyron

6. Point Autofocus Instruments
Katsuhiro Miura, Atsuko Nose

7. Focus Variation Instruments
Franz Helmli

8. Phase Shifting Interferometry
Peter Groot

9. Coherence Scanning Interferometry
Peter Groot

10. Digital Holographic Microscopy
Tristan Colomb, Jonas Kühn

11. Imaging Confocal Microscopy
Roger Artigas

12. Light Scattering Methods
Theodore V. Vorburger, Richard Silver, Rainer Brodmann, Boris Brodmann, Jörg Seewig

Keywords: Materials Science, Characterization and Evaluation of Materials, Microwaves, RF and Optical Engineering, Measurement Science and Instrumentation, Surfaces and Interfaces, Thin Films