Handbook of Thin-Film Technology

1. Applications and Developments of Thin Film Technology
Hartmut Frey

2. Relevance of the Vacuum Technology for Thin Film Coatings
Hartmut Frey

3. Vacuum Evaporation
Hartmut Frey

4. Basic Principle of Plasma Physics
Hartmut Frey

5. Gaseous Phase and Surface Processes
Hartmut Frey

6. Cathode Sputtering
Hartmut Frey

7. Plasma Treatment Methods
Hartmut Frey

8. Particle Beam Sources
Hartmut Frey

9. Chemical Vapor Deposition (CVD)
Hartmut Frey

10. Physical Basics of Modern Methods of Surface and Thin Film Analysis
Hartmut Frey

11. Insitu Measurements
Hartmut Frey

12. Measurements of Thin Layers After the Coating Process
Hartmut Frey, Thomas Helmut

13. Nanoparticle Films
Hamid R. Khan

14. Erratum to: Measurements of Thin Layers After the Coating Process
Hartmut Frey, Thomas Hellmuth

Keywords: Materials Science, Surfaces and Interfaces, Thin Films, Characterization and Evaluation of Materials, Nanotechnology, Tribology, Corrosion and Coatings, Physical Chemistry, Optical and Electronic Materials