Low Pressure Plasmas and Microstructuring Technology

2. Introduction
Gerhard Franz

3. Collisions and cross sections
Gerhard Franz

4. The plasma
Gerhard Franz

5. DC discharges
Gerhard Franz

6. High-frequency discharges I
Gerhard Franz

7. High-frequency discharges II
Gerhard Franz

8. High-frequency discharges III
Gerhard Franz

9. Ion beam systems
Gerhard Franz

10. Plasma diagnostics
Gerhard Franz

11. Plasma deposition processes
Gerhard Franz

12. Plasma etch processes
Gerhard Franz

13. Etch Mechanisms
Gerhard Franz

14. Outlook
Gerhard Franz

15. Advanced Topics
Gerhard Franz

Keywords: Material Science, Atomic and Molecular Structure and Spectra, Surfaces and Interfaces, Thin Films, Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials