Into the Nano Era

Part I. Historical Background

1. Silicon: Child and Progenitor of Revolution
R. W. Cahn

2. The Economic Implications of Moore’s Law
G. D. Hutcheson

Part II. State-of-the-Art

3. Using Silicon to Understand Silicon
J. R. Chelikowsky

4. Theory of Defects in Si: Past, Present, and Challenges
S. K. Estreicher

5. Structural, Elemental, and Chemical Complex Defects in Silicon and Their Impact on Silicon Devices
A. A. Istratov, T. Buonassisi, E. R. Weber

6. Surface and Interface Chemistry for Gate Stacks on Silicon
M. M. Frank, Y. J. Chabal

7. Enhanced Carrier Mobility for Improved CMOS Performance
P. M. Mooney

8. Transistor Scaling to the Limit
T. -J. K. Liu, L. Chang

Part III. Future Directions

9. Beyond CMOS Electronics: Self-Assembled Nanostructures
T. I. Kamins

10. Hybrid CMOS/Molecular Integrated Circuits
M. R. Stan, G. S. Rose, M. M. Ziegler

11. Sublithographic Architecture: Shifting the Responsibility for Perfection
A. DeHon

12. Quantum Computing
D. P. DiVincenzo

Part IV. Afterwords

13. Nano-Whatever: Do We Really Know Where We Are Heading?
H. Kroemer

14. Silicon Forever! Really?
H. L. Stormer

Keywords: TECHNOLOGY & ENGINEERING / Material Science TEC021000