Thermal Transport for Applications in Micro/Nanomachining

1. Introduction

2. Transport Equations

3. Modeling of Transport Equations via MC Methods

4. Modeling of e-Beam Transport

5. Thermal Conduction Coupled with e-Beam Transport

6. Two-Temperature Model Coupled with e-Beam Transport

7. Thermal Conduction with Electron Flow/Ballistic Behavior

8. Parallel Computations for Two-Temperature Model

9. Molecular Dynamics Simulations

10. Concluding Remarks

DRM-restrictions

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Keywords: SCIENCE / Chemistry / General SCI013000