Baltes, Henry P.
CMOS Hotplate Chemical Microsensors
Table of contents
1. Introduction
2. Miniaturized Metal-Oxide Sensors
3. Thermal Modelling of CMOS Microhotplates
4. Microhotplates in CMOS Technology
5. Monolithic Gas Sensor Systems
6. Microsensor Arrays
7. Conclusion and Outlook
DRM-restrictions
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- Author(s)
- Baltes, Henry P.
- Barrettino, Diego
- Graf, Markus
- Hierlemann, Andreas
- Publisher
- Springer
- Publication year
- 2007
- Language
- en
- Edition
- 1
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (PDF)
- 9783540695622