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Korvink, Jan G.

MEMS: A Practical Guide to Design, Analysis, and Applications

Korvink, Jan G. - MEMS: A Practical Guide to Design, Analysis, and Applications, ebook

358,40€

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ISBN: 9783540336556
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Table of contents

1. Microtransducer Operation
Oliver Paul

2. Material Properties: Measurement and Data
Osamu Tabata, Toshiyuki Tsuchiya

3. MEMS and NEMS Simulation
Jan G. Korvink, Evgenii B. Rudnyi, Andreas Greiner, Zhenyu Liu

4. System-Level Simulation of Microsystems
Gary K. Fedder

5. Thermal-Based Microsensors
Friedemann Vöelklein

6. Photon Detectors
Arokia Nathan, Karim S. Karim

7. Free-Space Optical MEMS
Ming C. Wu, Pamela R. Patterson

8. Integrated Micro-Optics
Hans Zappe

9. Microsensors for Magnetic Fields
Chavdar Roumenin

10. Mechanical Microsensors
Franz Laermer

11. Semiconductor-Based Chemical Microsensors
Andreas Hierlemann, Henry Baltes

12. Microfluidics
Jens Ducrée, Peter Koltay, Roland Zengerle

13. Biomedical Systems
Whye-Kei Lye, Michael Reed

14. Microactuators
Jack W. Judy

15. Micromachining Technology
Paddy J. French, Pasqualina M. Sarro

16. LIGA Technology for R&D and Industrial Applications
Ulrike Wallrabe, Volker Salle

17. 17 Interface Circuitry and Microsystems
Piero Malcovati, Franco Maloberti

Keywords: Engineering, Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Nanotechnology, Microwaves, RF and Optical Engineering

Author(s)
 
Publisher
Springer
Publication year
2006
Language
en
Edition
1
Page amount
990 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9783540336556

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