CCD Image Sensors in Deep-Ultraviolet

1. Introduction

2. Overview of CCD

3. CCD Imaging in the Ultraviolet (UV) Regime

4. Silicon

5. Silicon Dioxide

6. Si-SiO2 Interface

7. General Effects of Radiation

8. Effects of Radiation on CCDs

9. UV-Induced Effects in Si

10. UV Laser Induced Effects in SiO2

11. UV Laser Induced Effects at the Si-SiO2 Interface

12. CCD Measurements at 157nm

13. Design Optimizations for Future Research

14. Concluding Remarks

DRM-restrictions

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Keywords: SCIENCE / Chemistry / General SCI013000