Baltes, H.
Integrated Chemical Microsensor Systems in CMOS Technology
Table of contents
1. Introduction
2. Fundamentals of Chemical Sensing
3. Microtechnology for Chemical Sensors
4. Microfabricated Chemical Sensors
5. CMOS Platform Technology for Chemical Sensors
6. Outlook and Future Developments
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Keywords: SCIENCE / Chemistry / General SCI013000
- Author(s)
- Baltes, H.
- Fujita, Hiroyuki
- Hierlemann, Andreas
- Liepmann, Dorian
- Publisher
- Springer
- Publication year
- 2005
- Language
- en
- Edition
- 1
- Category
- Natural Sciences
- Format
- Ebook
- eISBN (PDF)
- 9783540273721
