Shape and Functional Elements of the Bulk Silicon Microtechnique

1. Introduction
2. Technological Basis of Bulk-Silicon-Microtechnique
3. Orientation Dependent Etching of Silicon
4. General Overview of the Shape- and Functional Elements and the Procedure of their Design
5. Simple Shape Elements
6. Elements for Mechanical Applications
7. Elements for Fluidic Applications
8. Elements for Optical Applications

DRM-restrictions

Printing: not available
Clipboard copying: not available

Keywords: SCIENCE / Chemistry / General SCI013000