Login

Baltes, Henry

Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems

Baltes, Henry - Enabling Technologies for MEMS and Nanodevices  Advanced Micro and Nanosystems, ebook

81,80€

Ebook, PDF with Adobe DRM
ISBN: 9783527675050
DRM Restrictions

Printing159 pages with an additional page accrued every 5 hours, capped at 159 pages
Copy to clipboard5 excerpts

Now available in softcover, this book closely examines the enabling technologies for the fabrication of micro- and nanodevices.
Divided into two clearly structured sections, the first begins with an insider's view of industrial MEMS commercialization, followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, as well as the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics, with a contribution on each of simulation tools and on devices and uses, followed by another two on nanosensors, featuring CNT sensors and CMOS-based DNA sensor arrays.

Keywords: MEMS and Nanoelectronics

Author(s)
 
 
 
 
 
Publisher
John Wiley and Sons, Inc.
Publication year
2013
Language
en
Edition
1
Page amount
529 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9783527675050
Printed ISBN
9783527334988

Similar titles