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Jones, Anthony C.

CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications

Jones, Anthony C. - CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications, ebook

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Ebook, PDF with Adobe DRM
ISBN: 9783527614622
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Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials.

Topics included:

* techniques for compound semiconductor growth

* metalorganic precursors for III-V MOVPE

* metalorganic precursors for II-VI MOVPE

* single-source precursors

* chemical beam epitaxy

* atomic layer epitaxy

Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.

Keywords: TECHNOLOGY & ENGINEERING / Material Science TEC021000

Author(s)
 
Publisher
John Wiley and Sons, Inc.
Publication year
2008
Language
en
Edition
1
Page amount
352 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9783527614622
Printed ISBN
9783527292943