Wilkening, Günter
Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range
Topics addressed in these proceedings are
a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing
b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements
c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing
- Author(s)
- Wilkening, Günter
- Koenders, Ludger
- Publisher
- John Wiley and Sons, Inc.
- Publication year
- 2006
- Language
- en
- Edition
- 1
- Page amount
- 541 pages
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (PDF)
- 9783527606870
- Printed ISBN
- 9783527405022