Login

Brand, Oliver

Resonant MEMS: Fundamentals, Implementation, and Application

Brand, Oliver - Resonant MEMS: Fundamentals, Implementation, and Application, ebook

170,50€

Ebook, ePUB with Adobe DRM
ISBN: 9783527676354
DRM Restrictions

Printing135 pages with an additional page accrued every 6 hours, capped at 135 pages
Copy to clipboard5 excerpts

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Keywords: resonator piezoelectricity packaging stability biosensors fluid energy harvesting, resonator piezoelectricity packaging stability biosensors fluid energy harvesting, MEMS and Nanoelectronics

Editor
 
 
 
 
 
 
 
Publisher
John Wiley and Sons, Inc.
Publication year
2014
Language
en
Edition
1
Series
Advanced Micro and Nanosystems
Page amount
450 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (ePUB)
9783527676354
Printed ISBN
9783527335459

Similar titles