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Shim, Seongbo

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Shim, Seongbo - Physical Design and Mask Synthesis for Directed Self-Assembly Lithography, ebook

138,35€

Ebook, PDF with Adobe DRM
ISBN: 9783319762944
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Table of contents

1. Introduction
Seongbo Shim, Youngsoo Shin

Part I. Physical Design Optimizations

2. DSAL Manufacturability
Seongbo Shim, Youngsoo Shin

3. Placement Optimization for DSAL
Seongbo Shim, Youngsoo Shin

4. Post-Placement Optimization forMP-DSAL Compliant Layout
Seongbo Shim, Youngsoo Shin

5. Redundant Via Insertion for DSAL
Seongbo Shim, Youngsoo Shin

6. Redundant Via Insertion for MP-DSAL
Seongbo Shim, Youngsoo Shin

Part II. Mask Synthesis and Optimizations

7. DSAL Mask Synthesis
Seongbo Shim, Youngsoo Shin

8. Verification of Guide Patterns
Seongbo Shim, Youngsoo Shin

9. Cut Optimization
Seongbo Shim, Youngsoo Shin

10. Summary of The Book
Seongbo Shim, Youngsoo Shin

Keywords: Materials Science, Nanotechnology, Nanotechnology and Microengineering, Circuits and Systems, Optical and Electronic Materials, Nanoscale Science and Technology, Semiconductors

Author(s)
 
Publisher
Springer
Publication year
2018
Language
en
Edition
1
Series
NanoScience and Technology
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9783319762944
Printed ISBN
978-3-319-76293-7

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