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Arce, María Ángela Pampillón

Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets

Arce, María Ángela Pampillón - Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets, ebook

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ISBN: 9783319666075
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Table of contents

1. Introduction
María Ángela Pampillón Arce

2. Fabrication Techniques
María Ángela Pampillón Arce

3. Characterization Techniques
María Ángela Pampillón Arce

4. Thermal Oxidation of Gd2O3

María Ángela Pampillón Arce

5. Plasma Oxidation of Gd2O3 and Sc2O3

María Ángela Pampillón Arce

6. Gadolinium Scandate
María Ángela Pampillón Arce

7. Interface Scavenging
María Ángela Pampillón Arce

8. Gd2O3 on InP Substrates
María Ángela Pampillón Arce

9. Conclusions and Future Work
María Ángela Pampillón Arce

Keywords: Physics, Surface and Interface Science, Thin Films, Nanotechnology, Electronic Circuits and Devices, Nanotechnology and Microengineering

Author(s)
Publisher
Springer
Publication year
2017
Language
en
Edition
1
Series
Springer Theses
Page amount
23 pages
Category
Natural Sciences
Format
Ebook
eISBN (PDF)
9783319666075
Printed ISBN
978-3-319-66606-8

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