Arce, María Ángela Pampillón
Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
Table of contents
1. Introduction
María Ángela Pampillón Arce
2. Fabrication Techniques
María Ángela Pampillón Arce
3. Characterization Techniques
María Ángela Pampillón Arce
4. Thermal Oxidation of Gd
María Ángela Pampillón Arce
5. Plasma Oxidation of Gd
María Ángela Pampillón Arce
6. Gadolinium Scandate
María Ángela Pampillón Arce
7. Interface Scavenging
María Ángela Pampillón Arce
8. Gd
María Ángela Pampillón Arce
9. Conclusions and Future Work
María Ángela Pampillón Arce
Keywords: Physics, Surface and Interface Science, Thin Films, Nanotechnology, Electronic Circuits and Devices, Nanotechnology and Microengineering
- Author(s)
- Arce, María Ángela Pampillón
- Publisher
- Springer
- Publication year
- 2017
- Language
- en
- Edition
- 1
- Series
- Springer Theses
- Page amount
- 23 pages
- Category
- Natural Sciences
- Format
- Ebook
- eISBN (PDF)
- 9783319666075
- Printed ISBN
- 978-3-319-66606-8
