Piezoelectric MEMS Resonators

Part I. Materials for Piezoelectric MEMS Resonators

1. AlN Thin Film Processing and Basic Properties
Paul Muralt

2. Lead Zirconate Titanate (PZT) for M/NEMS
Ronald G. Polcawich, Jeffrey S. Pulskamp

3. Gallium Nitride for M/NEMS
Mina Rais-Zadeh, Dana Weinstein

4. Lithium Niobate for M/NEMS Resonators
Songbin Gong

Part II. Design of Piezoelectric MEMS Resonators

5. Quality Factor and Coupling in Piezoelectric MEMS Resonators
Reza Abdolvand, Hedy Fatemi, Sina Moradian

6. Flexural Piezoelectric Resonators
David Horsley, Yipeng Lu, Ofer Rozen

7. Laterally Vibrating Piezoelectric MEMS Resonators
Matteo Rinaldi

8. BAW Piezoelectric Resonators
Ken-ya Hashimoto

9. Shear Piezoelectric MEMS Resonators
D. T. Chang, D. J. Kirby

10. Temperature Compensation of Piezo-MEMS Resonators
Wanling Pan

11. Computational Modeling Challenges
Mattan Kamon

Part III. Manufacturing and Reliability of Piezoelectric MEMS Resonators

12. Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators
Roozbeh Tabrizian

13. Reliability and Quality Assessment (Stability and Packages)
Robert Gubser

14. Large Volume Testing and Calibration
Minfan Pai

Part IV. Real World Implementations

15. High Frequency Oscillators for Mobile Devices
Jan H. Kuypers

16. BAW Filters and Duplexers for Mobile Communication
Robert Aigner

Keywords: Engineering, Electronics and Microelectronics, Instrumentation, Nanotechnology and Microengineering, Nanotechnology, Optical and Electronic Materials