Precision Nanometrology

1. Angle Sensor for Measurement of Surface Slope and Tilt Motion

2. Laser Autocollimator for Measurement of Multi-axis Tilt Motion

3. Surface Encoder for Measurement of In-plane Motion

4. Grating Encoder for Measurement of In-plane and Out-of-plane Motion

5. Scanning Multi-probe System for Measurement of Roundness

6. Scanning Error Separation System for Measurement of Straightness

7. Scanning Micro-stylus System for Measurement of Micro-aspherics

8. Large Area Scanning Probe Microscope for Micro-textured Surfaces

9. Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures

10. Scanning Image-sensor System for Measurement of Micro-dimensions

Keywords: Engineering, Manufacturing, Machines, Tools, Measurement Science and Instrumentation, Nanotechnology, Control, Robotics, Mechatronics