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Xu, Yongdong

Chemical Vapour Deposition

Xu, Yongdong - Chemical Vapour Deposition, ebook

161,20€

Ebook, PDF with Adobe DRM
ISBN: 9781848828940
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Table of contents

1. Introduction to Chemical Vapour Deposition

2. Physical Fundamentals of Chemical Vapour Deposition

3. Chemical Vapour Deposition Systems Design

4. Thermodynamics and Kinetics of Chemical Vapour Deposition

5. Chemical Vapour Infiltration

6. Microstructure Evolution and Process Control

Keywords: Engineering, Operating Procedures, Materials Treatment, Materials Science, general

Author(s)
 
Publisher
Springer
Publication year
2010
Language
en
Edition
1
Series
Engineering Materials and Processes
Page amount
356 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9781848828940

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