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Landis, Stefan

Lithography

Landis, Stefan - Lithography, ebook

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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

Keywords: sousa; de; introduction noronha; foreword; scanners; enhancement; besacier; maxime; lithography; ultraviolet; introduction; extreme; index; electromagnetic; materials; properties; complex; reflective; euv, Process Development, Process Development

Editor
Publisher
John Wiley and Sons, Inc.
Publication year
2010
Language
en
Edition
1
Series
ISTE
Page amount
320 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (ePUB)
9781118621189
Printed ISBN
9781848212022

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