Atomic Layer Deposition for Semiconductors

Part I. Introduction

1. Introduction
Cheol Seong Hwang, Cha Young Yoo

Part II. Fundamentals

2. ALD Precursors and Reaction Mechanisms
Roy G. Gordon

3. ALD Simulations
Simon D. Elliott

Part III. ALD for Memory Devices

4. Mass-Production Memories (DRAM and Flash)
Cheol Seong Hwang, Seong Keun Kim, Sang Woon Lee

5. PCRAM
Simone Raoux, Mikko Ritala

6. FeRAM
Susanne Hoffmann-Eifert, Takayuki Watanabe

Part IV. ALD for Logic Devices

7. Front End of the Line Process
Jeong Hwan Han, Moonju Cho, Annelies Delabie, Tae Joo Park, Cheol Seong Hwang

8. Back End of the Line
Hyungjun Kim, Soo-Hyun Kim, H. -B. -R. Lee

Part V. ALD Machines

9. ALD Machines
Schbuert Chu

Keywords: Chemistry, Electrochemistry, Semiconductors, Memory Structures, Energy Technology, Electronics and Microelectronics, Instrumentation